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motion plastic for the semiconductor industry

Semiconductor manufacturers endeavour to achieve high productivity rates. The overall equipment effectiveness (OEE) is correspondingly important and can be increased with solutions from igus®. Our energy supplies and cables for cleanroom applications support high production quality, as they are made of high-performance plastics that are abrasion-resistant and have low outgassing. They are compact, low-maintenance, easy to install and cost-effective. They also have a modular design so that system operators can expand them at any time. Our products, which increase the GAE in the semiconductor industry worldwide, are used in machines and systems for laser marking, EUV lithography and automatic optical inspection (AOI), among others.

Advantages of igus® products:

cleanroom and ESD-compatible
Low outgassing
Compact and lightweight
cost-effective
Online service life calculation
Maintenance-free (24/7 use)
Easy to install
Low noise and low vibration
Complete system or individual components from batch size 1
Fast delivery

Selected products for the semiconductor industry

Flat cable routing system e-skin® flat and CFCLEAN stranding system
► Cleanroom-compatible according to IPA ISO class 1
► Modular and compact design
► Cable can be dusted out in minutes
► With coordinated CFCLEAN stranding system for high reliability
► Available from stock
► No minimum order quantity

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Customer application examples

e-skin flat in use in a linear system with air bearings

Linear system with air bearings for highly precise adjustments

An e-skin flat SKF12.4.03.01.1 as a 4-fold layer together with PVC & TPE cables from igus ensures the reliable energy supply of an air bearing linear system.

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Cables for the cleanroom, with over 31 million cycles a year

<br />The energy supply in these volume pattern generator systems must run absolutely smoothly in the cleanroom despite continuous operation.<br />
The solution: the e-skin flat

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Fixload semiconductor automation system from the Brooks company

Semiconductor automation system
E6 and E14 series energy chains are used in the production of the Fixload semiconductor automation system. The sensitive application area of the loading interface for 300 mm wafer process devices requires clean air. The e-chains meet the requirements: they are wear-resistant and suitable for cleanrooms of IPA ISO class 2 and 3.

Consulting

I look forward to answering your questions

igus® GmbH+49 2203 9649-0 Write e-mail

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